#7,896,904 (-1%) - tystar.com
Title: TYSTAR: Home
Description: Tystar, quality horizontal small footprint diffusion, oxidation and low-pressure chemical vapor deposition (LPCVD) furnace systems and equipment for Semiconductor, MEMS, Solar Cell, Micro/Nanotechnology Industries.
Keywords:Thermal processing solutions, atmospheric, LPCVD, horizontal tube furnace systems, small footprint, low pressure chemical vapor deposition LPCVD, diffusion furnaces, atmospheric oxidation equipment, diffusion, low stress silicon nitride LPCVD equipment, oxidation, horizontal low temperature oxide, polysilicon LPCVD furnace systems, application support, small foot print TEOS furnace equipment, silicon germane LPCVD furnace systems, silicon carbide LPCVD furnace equipment, microelectronics, wafer processing, wafer fabrication, integrated circuits, MEMS, MST, solar cells, Microtechnology,
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